Silicon-Based Micro-Fourier Spectrometer
نویسندگان
چکیده
منابع مشابه
Thin Film Technology Based Micro-fourier Spectrometer
A novel Fourier spectrometer using thin film technology was developed. The spectrometer based on a semi transparent thin film detector in combination with a tunable micro machined mirror. The semi transparent detector is introduced into a standing wave created in front of the mirror to sample the profile of the standing wave. Varying the position of the mirror results in a shift of the phase of...
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ژورنال
عنوان ژورنال: IEEE Transactions on Electron Devices
سال: 2005
ISSN: 0018-9383
DOI: 10.1109/ted.2005.843880